AFM probe for measuring ∼10−5 ultra-low friction coefficient: Design and application

Abstract Superlubricity provides a novel approach to addressing friction and wear issues in mechanical systems. However, little is known regarding improving the atomic force microscope (AFM) coefficient measurement resolution. Accordingly, this study established theoretical formula for AFM deduced Then, was applied probe with rectangular cross-section cantilever. The resolution associated dimensional properties of probe, cantilever material, position-sensitive detector (PSD), probably anti-vibration performance AFM. It feasible make as short possible tip high improve An measuring an ultra-low designed fabricated. cantilever’s length, width, thickness are 50, 35, 0.6 µm, respectively. height 23 µm. can reach 7.1×10 −6 under maximum normal force. Moreover, measure superlubricity between graphene layers. 0.00139 853.08 nN. This work promising method ∼10 −5 superlubricity.